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General PVD System SA-eVictor AX20P

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SKU: SA-eVictor AX20P
Wafer Size6″, 8″
THK mean(A)1000Ā±50(Ni), 600Ā±30(Ti), 1000Ā±50(TiN), 40KĀ±2K(Al)
Rs Mean(Ī©/ā–”)1Ā±0.02(Ni), 11Ā±1.0(Ti), 16Ā±3.0(TiN), 0.75Ā±0.05(Al)
Rs U%(WIW,%,16)< 3%
Infilm Particle< 30ea@0.3Ī¼m
Size(LƗWƗH)4400mmƗ3100mmƗ2200mm, 2700mmƗ3200mmƗ2200mm
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General PVD System SA-Polaris BM620

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SKU: SA-Polaris BM620
Wafer Size6″, 8″
THK mean(A)1500Ā±75(Ni), 2000Ā±100(Ti), 10KĀ±500(Ag)
Rs Mean(Ī©/ā–”)0.6Ā±0.1(Ni), 2.9Ā±0.3(Ti), 0.021Ā±0.005(Ag)
Rs U%(WIW,%,16)< 3@EE3
Infilm Particle< 30ea@0.3Ī¼m
Size(LƗWƗH)2700mmƗ3200mmƗ2200mm, 4400mmƗ3100mmƗ2200mm