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Fully automatic after gringing cleaning manchine SA-AGCM-48LS

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SKU: SA-AGCM-48LS
Wafer Size4″~8″
Cleaning Capacity25pieces2baskets/batch
Control PartPLC and HMI
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Fully automatic cassette cleaning manchine SA-CCM-48LS

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SKU: SA-CCM-48LS
Wafer Size6″, 8″
Cleaning Capacitycassete:8pieces/batch, basket:16pieces/batch
Up Timeā‰„98%
MTTR<2hrs
MTBFā‰„400hrs
Control PartPLC and HMI
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Fully automatic de-edge cleaning manchine SA-DECM-48LS

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SKU: SA-DECM-48LS
Wafer Size6″~8″
Edge Triming AccuracyĀ±0.1mm
Control PartPLC and HMI
Gas ProjectionCDA/N2
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Fully automatic final cleaning manchine SA-FCM-48LS

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SKU: SA-FCM-48LS
Wafer Size6″, 8″
Processing Capacity50 wafers /tank time
Solution Temperature50ā„ƒ~80ā„ƒĀ±1ā„ƒ
Megasonic Cleaning950KHz,400W
Solution Accuracy Errorā‰¤ 1%
Metal Ionsā‰¤ 5E10 atoms/cm2
Particle Controlā‰¤ 10 pieces/wafer@0.3Ī¼m, ā‰¤ 20 pieces/wafer@0.2Ī¼m
Production Efficiencyā‰„ 275 wafers/hour
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Fully automatic furnace tube cleaning manchine SA-FTCM-48LS

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SKU: SA-FTCM-48LS
Tube SizeĪ¦450mm
Control PartPLC and HMI
Gas ProjectionCDA/N2
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Fully automatic Nickel and Gold Plating Cleaning Machine SA-NAGP-48LS

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SKU: SA-NAGP-48LS
Temperature Control AccuracyĀ±1ā„ƒ
Control PartPLC and HMI
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Fully automatic RCA cleaning manchine SA-RCA-48LS

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SKU: SA-RCA-48LS
Wafer Size12″, 4″, 5″, 6″, 8″
Cleaning Capacity4″~8″:25pieces2baskets/batch, 12″:25pieces/batch
Control PartPLC and HMI
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Fully automatic single wafer cleaner SA-SWC-48LS

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SKU: SA-SWC-48LS
Wafer Size4″&6″, 6″&8″, 8″&12″
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Fully automatic wafer etching manchine SA-WEM-48LS

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SKU: SA-WEM-48LS
Wafer Size4″~12″
Ness IncrementĪ“TTVā‰¤1.5Ī¼m
Cleaning Capacity6″:75pieces/time, 8″/12″:50pieces/time
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Horizontal dryer SA-HLD-48LS

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SKU: SA-HLD-48LS
NoneNone
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Vertical dryer SA-VLD-48LS

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SKU: SA-VLD-48LS
NoneNone