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Poly-Si Etcher SA-NMC508SES
Fabrication
,
Etchers
,
Poly-Si Etchers
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SKU:
SA-NMC508SES
Wafer Size
6″
,
8″
Etching Materials
Si
,
PolySi
Processes
Poly EB/STI/Poly gate/CT Si
Coil
Dual Zone
Match Mode
L-Match
Magnetic Shield
Yes
Gas Injector
Dual Zone
FRC
Yes
Liner
Symmetric Grid
Edge Ring
CIP version
ESC
Dual Zone
ESC Materials
Ceramic
Lift Pin
Ceramic
Turbo
1600L/s
Chamber
Symmetric
Size(L×W×H)
3279mm×3253mm×2339mm
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