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Poly-Si Etchers perform precise etching for polysilicon layers in semiconductor processes. With reliable process stability and uniform etching performance, they ensure high-quality patterning for optoelectronic and chip manufacturing.
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Poly-Si Etchers
Poly-Si Etcher SA-NMC508SES
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SKU:
SA-NMC508SES
| Wafer Size | 6″, 8″ |
|---|---|
| Etching Materials | PolySi, Si |
| Processes | Poly EB/STI/Poly gate/CT Si |
| Coil | Dual Zone |
| Match Mode | L-Match |
| Magnetic Shield | Yes |
| Gas Injector | Dual Zone |
| FRC | Yes |
| Liner | Symmetric Grid |
| Edge Ring | CIP version |
| ESC | Dual Zone |
| ESC Materials | Ceramic |
| Lift Pin | Ceramic |
| Turbo | 1600L/s |
| Chamber | Symmetric |
| Size(L×W×H)or(D×W×H) | 3279mm×3253mm×2339mm |