Metal Etcher SA-NMC508SEM
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Poly-Si Etcher SA-NMC508SES
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Poly-Si Etcher SA-NMC508SES

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SKU: SA-NMC508SES

Ā Ā Ā Ā Ā Ā SA-NMC508SES is a mature 6/8-inch poly-Si etch equipment for mass production. It serves logic, BCD, Si/SiC power, MEMS and TFT chips, supporting Poly gate, STI, CT Si and other core processes. Adopting dual-zone plasma, gas injection and ceramic ESC designs, it delivers outstanding process uniformity and extended component lifespan. Most mainstream manufacturing processes have been verified in volume production with stable performance and competitive cost advantages.Ā 

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Description

Datasheet

SA-NMC508SES is a mature 6/8-inch poly-Si etch equipment for mass production. It serves logic, BCD, Si/SiC power, MEMS and TFT chips, supporting Poly gate, STI, CT Si and other core processes. Adopting dual-zone plasma, gas injection and ceramic ESC designs, it delivers outstanding process uniformity and extended component lifespan. Most mainstream manufacturing processes have been verified in volume production with stable performance and competitive cost advantages.

Feature

Application
  • Good process uniformity
  • Comparable
  • 300mm tech
  • Longer Lifetime
  • More symmetric flow fleid
  • Logic
  • BCD
  • Si/SiC Power
  • MEMS
  • TFT

Principleļ¼š

Specification

Features

Wafer Size6″, 8″
Etching MaterialsSi, PolySi

General

ProcessesPoly EB/STI/Poly gate/CT Si
CoilDual Zone
Match ModeL-Match
Magnetic ShieldYes
Gas InjectorDual Zone
FRCYes
LinerSymmetric Grid
Edge RingCIP version
ESCDual Zone
ESC MaterialsCeramic
Lift PinCeramic
Turbo1600L/s
ChamberSymmetric
Size(LƗWƗH)3279mmƗ3253mmƗ2339mm

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