Dielectric Etcher SA-NMC508SDH/SDL
Dielectric Etcher SA-NMC508SDH/SDL Call for Price
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Poly-Si Etcher SA-NMC508SES
Poly-Si Etcher SA-NMC508SES Call for Price
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Metal Etcher SA-NMC508SEM
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Metal Etcher SA-NMC508SEM

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SKU: SA-NMC508SEM

Ā Ā Ā Ā Ā Ā SA-NMC508SEM is a mass-production proven 6/8-inch metal etcher targeting logic, Si/SiC/GaN power and MEMS devices. It etches AlCu, W, TiN and related alloys for TM, IM and WEB processes. Equipped with dual coils and fully-automatic RF matching, it features 1600L/s high-flow pump and 350RFh long MTBC, ensuring superior etching uniformity, high throughput and low operation cost.Ā 

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Description

Datasheet
SA-NMC508SEM is a mass-production proven 6/8-inch metal etcher targeting logic, Si/SiC/GaN power and MEMS devices. It etches AlCu, W, TiN and related alloys for TM, IM and WEB processes. Equipped with dual coils and fully-automatic RF matching, it features 1600L/s high-flow pump and 350RFh long MTBC, ensuring superior etching uniformity, high throughput and low operation cost.

Feature

Application
  • Improve Etch U%
  • Comparable
  • High Etch Rate
  • Better PA Control
  • Better CoO & CoC
  • Logic
  • Power
  • SiCĀ 
  • MEMS
  • GaN

Principleļ¼š

Specification

Features

Wafer Size6″, 8″
Etching MaterialsTi, TiW, AlCu, AlSiCu, W, TiN

General

ProcessesTM/IM/WEB
CoilDual Coil
Match ModeFully automatic matching
Upper frequency13.56MHz
Window HeatingHeater Heating
Chamber HeatingChiller
Pump1600L/s
N2 Pressure ControlY
Throughput6K/M
MTBC350RFh
Size(LƗWƗH)3250mmƗ2580mmƗ2397mm

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Magnetic ShieldYes
Gas InjectorDual Zone
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LinerSymmetric Grid
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ESCDual Zone
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