Fully automatic final cleaning manchine SA-FCM-48LS

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SKU: SA-FCM-48LS

Ā Ā Ā Ā Ā Ā SA-FCM-48LS adopts advanced cassette-less transmission and professional drying technologies to finally remove surface contaminants. It applies megasonic circulation cleaning for superior cleaning quality. The equipment supports connection with management systems and maintains excellent particle and metal ion control. It runs stably and efficiently, fully meeting the strict final cleaning standards for semiconductor wafers.Ā 

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Description

SA-FCM-48LS adopts advanced cassette-less transmission and professional drying technologies to finally remove surface contaminants. It applies megasonic circulation cleaning for superior cleaning quality. The equipment supports connection with management systems and maintains excellent particle and metal ion control. It runs stably and efficiently, fully meeting the strict final cleaning standards for semiconductor wafers.

Feature

Application

  • Cassetteless
  • Megasonic Circulation Cleaning
  • Support MES system
  • Pull IR or Marangoi Drying
  • Polished Silicon Wafer
  • Epitaxial Wafer
  • Particle and Metal Ion

Specification

Features

Wafer Size6″, 8″

General

Processing Capacity50 wafers /tank time
Solution Temperature50ā„ƒ~80ā„ƒĀ±1ā„ƒ
Megasonic Cleaning950KHz,400W
Solution Accuracy Error≤ 1%
Metal Ions≤ 5E10 atoms/cm2
Particle Control≤ 10 pieces/wafer@0.3μm, ≤ 20 pieces/wafer@0.2μm
Production Efficiency≄ 275 wafers/hour

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