Vertical dryer SA-VLD-48LS

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SKU: SA-VLD-48LS

Ā Ā Ā Ā Ā Ā SA-VLD-48LS is driven by high-performance brushless motors for stable operation. It adopts nitrogen sealing to maintain a pure internal environment. Integrating multiple processing functions, it efficiently removes residues and particles. Built with static elimination and self-reset designs, it features comprehensive safety protection, perfectly adapting to high-standard semiconductor production.Ā 

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Description

SA-VLD-48LS is driven by high-performance brushless motors for stable operation. It adopts nitrogen sealing to maintain a pure internal environment. Integrating multiple processing functions, it efficiently removes residues and particles. Built with static elimination and self-reset designs, it features comprehensive safety protection, perfectly adapting to high-standard semiconductor production.Ā 

Feature

Application

  • Burshless Motor
  • Nitrogen Sealed Rotating Shaft
  • Static Elimination Function
  • Mechanical Self-reset Function
  • Silicon Wafer
  • Lithography Wafer
  • Glass Substrate
  • Watermark-free Surface Treatment

Specification

General

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