Vacuum Die Bonder SA-WB061

SKU: SA-WB061

      The SA-WB061 Vacuum Die Bonder is a device
designed for the temporary bonding of wafers to
substrates. It is capable of fixing and bonding
wafers with a diameter of 150 mm or less, and is
mainly composed of a vacuum unit, heating unit,
cooling unit, airbag pressurizing unit, and other
components, as illustrated in the figure below. 

Description

The SA-WB061 Vacuum Die Bonder is a device designed for the temporary bonding of wafers to substrates. It is capable of fixing and bonding wafers with a diameter of 150 mm or less, and is mainly composed of a vacuum unit, heating unit, cooling unit, airbag pressurizing unit, and other components, as illustrated in the figure below.

Feature

Application

  • Easy operation
  • High precision
  • Advanced thermal control
  • Airbag bonding
  • Wafer bonding
  • Wafer pre-processing
  • MEMS
  • Semiconductor

Specification

Features

Wafer Size150mm, 200mm, 300mm

General

FunctionsTiming, pressurization, heating(included), vacuum(included), cooling(included)
Bond Pressure0~3bar (adjustable)
ThroughputDepends on the process
Chamber EnvironmentVacuum Pump included
Power Requirements220V, 10A
Equipment Power1KW
Size(L×W×H)or(D×W×H)650mm×600mm×350mm
Weight50kg
Temperature RangeRT~200℃

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