Horizontal dryer SA-HLD-48LS

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SKU: SA-HLD-48LS

Ā Ā Ā Ā Ā Ā SA-HLD-48LS adopts intelligent control for easy and reliable operation. The rotating shaft is sealed with nitrogen to isolate the internal space effectively. Its precisely calibrated rotating structure runs steadily with low wafer damage risk. Equipped with auxiliary heating, it delivers thorough drying performance, fully meeting the strict cleanliness requirements of semiconductor production.Ā 

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Description

SA-HLD-48LS adopts intelligent control for easy and reliable operation. The rotating shaft is sealed with nitrogen to isolate the internal space effectively. Its precisely calibrated rotating structure runs steadily with low wafer damage risk. Equipped with auxiliary heating, it delivers thorough drying performance, fully meeting the strict cleanliness requirements of semiconductor production.Ā 

Feature

Application

  • PLC Intelligent Control
  • Nitrogen Sealed Rotating Shaft
  • A Load-bearing Structure
  • Dry and Waterless
  • Silicon Wafer
  • Lithography Wafer
  • Glass Substrate
  • Watermark-free Surface Treatment

Specification

General

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