Fully automatic wafer etching manchine SA-WEM-48LS

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SKU: SA-WEM-48LS

Ā Ā Ā Ā Ā Ā SA-WEM-48LS features a specially designed rotating mechanism for steady immersion processing. It delivers highly uniform etching results and adopts circulating filtration to reuse chemical liquids. With intelligent temperature control and gas regulating functions, it works efficiently. It supports data interconnection with management systems and has comprehensive protection designs to safeguard wafers during operation.Ā 

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Description

SA-WEM-48LS features a specially designed rotating mechanism for steady immersion processing. It delivers highly uniform etching results and adopts circulating filtration to reuse chemical liquids. With intelligent temperature control and gas regulating functions, it works efficiently. It supports data interconnection with management systems and has comprehensive protection designs to safeguard wafers during operation.

Feature

Application

  • Immersion Etching Cleaning
  • Special Rotary Basket Mechanism
  • Adjustable Nitrogen Bubbling Rate
  • Support MES system
  • Inline Heating, Cooling and Constant Temperature
  • Wafer Front-End Cleaning
  • Photolithography Cleaning
  • Etch Post-Cleaning
  • Thin Film Cleaning
  • Back-End Packaging

Specification

Features

Wafer Size4″~12″

General

Ness IncrementĪ“TTV≤1.5μm
Cleaning Capacity6″:75pieces/time, 8″/12″:50pieces/time

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