Fully automatic cassette cleaning manchine SA-CCM-48LS

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SKU: SA-CCM-48LS

SA-CCM-48LS adopts flame-retardant material with excellent leakproof performance. It is equipped with comprehensive safety interlock and alarm systems for secure operation. Featuring stable running performance and low failure rate, it can connect with management systems. Following strict industrial standards, it delivers long-term reliable service for semiconductor supporting production.

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Description

Datasheet

SA-CCM-48LS adopts flame-retardant material with excellent leakproof performance. It is equipped with comprehensive safety interlock and alarm systems for secure operation. Featuring stable running performance and low failure rate, it can connect with management systems. Following strict industrial standards, it delivers long-term reliable service for semiconductor supporting production.

Feature	Application
Long-time Acidic Corrosion Resistant Double-layer Leak-proof Customize for Manual and Fully Automatic Support MES system Three-system Quality Control	Wafer Front-End Cleaning Photolithography Cleaning Etch Post-Cleaning Thin Film Cleaning Back-End Packaging

Specification

Features

Wafer Size	6″, 8″

General

Cleaning Capacity	cassete:8pieces/batch, basket:16pieces/batch
Up Time	≥98%
MTTR	<2hrs
MTBF	≥400hrs
Control Part	PLC and HMI

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Fully automatic final cleaning manchine SA-FCM-48LS

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SKU: SA-FCM-48LS

Wafer Size	8″, 6″
Processing Capacity	50 wafers /tank time
Solution Temperature	50℃~80℃±1℃
Megasonic Cleaning	950KHz,400W
Solution Accuracy Error	≤ 1%
Metal Ions	≤ 5E10 atoms/cm2
Particle Control	≤ 10 pieces/wafer@0.3μm, ≤ 20 pieces/wafer@0.2μm
Production Efficiency	≥ 275 wafers/hour