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Metal Etcher SA-NMC508SEM

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SKU: SA-NMC508SEM
Wafer Size6″, 8″
Etching MaterialsTi, TiW, AlCu, AlSiCu, W, TiN
ProcessesTM/IM/WEB
CoilDual Coil
Match ModeFully automatic matching
Upper frequency13.56MHz
Window HeatingHeater Heating
Chamber HeatingChiller
Pump1600L/s
N2 Pressure ControlY
Throughput6K/M
MTBC350RFh
Size(LƗWƗH)3250mmƗ2580mmƗ2397mm