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Metal Etcher SA-NMC508SEM
Fabrication
,
Etchers
,
Metal Etchers
Rated
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SKU:
SA-NMC508SEM
Wafer Size
6″
,
8″
Etching Materials
AlCu
,
AlSiCu
,
Ti
,
TiN
,
TiW
,
W
Processes
TM/IM/WEB
Coil
Dual Coil
Match Mode
Fully automatic matching
Upper frequency
13.56MHz
Window Heating
Heater Heating
Chamber Heating
Chiller
Pump
1600L/s
N2 Pressure Control
Y
Throughput
6K/M
MTBC
350RFh
Size(L×W×H)
3250mm×2580mm×2397mm
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