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General PVD System SA-eVictor AX20P
SKU:
SA-eVictor AX20P
In stock
Call for Price| Wafer Size | 6″, 8″ |
|---|---|
| THK mean(A) | 1000Ā±50(Ni), 600Ā±30(Ti), 1000Ā±50(TiN), 40KĀ±2K(Al) |
| Rs Mean(Ī©/ā”) | 1Ā±0.02(Ni), 11Ā±1.0(Ti), 16Ā±3.0(TiN), 0.75Ā±0.05(Al) |
| Rs U%(WIW,%,16) | < 3% |
| Infilm Particle | < 30ea@0.3Ī¼m |
| Size(LĆWĆH) | 4400mmĆ3100mmĆ2200mm, 2700mmĆ3200mmĆ2200mm |
General PVD System SA-Polaris BM620
SKU:
SA-Polaris BM620
In stock
Call for Price| Wafer Size | 8″, 6″ |
|---|---|
| THK mean(A) | 1500Ā±75(Ni), 2000Ā±100(Ti), 10KĀ±500(Ag) |
| Rs Mean(Ī©/ā”) | 0.6Ā±0.1(Ni), 2.9Ā±0.3(Ti), 0.021Ā±0.005(Ag) |
| Rs U%(WIW,%,16) | < 3@EE3 |
| Infilm Particle | < 30ea@0.3Ī¼m |
| Size(LĆWĆH) | 2700mmĆ3200mmĆ2200mm, 4400mmĆ3100mmĆ2200mm |