Ā Ā Ā Ā Ā Ā SA-DECM-48LS adopts vacuum handling structure for stable wafer conveying and precise edge trimming. It features fully automated loading and unloading and water recycling design for energy conservation. Key electrical parts are treated with anti-corrosion measures and gas protection. With reliable control system and perfect leakproof design, it operates safely and conforms to semiconductor industrial standards.Ā
SA-DECM-48LS adopts vacuum handling structure for stable wafer conveying and precise edge trimming. It features fully automated loading and unloading and water recycling design for energy conservation. Key electrical parts are treated with anti-corrosion measures and gas protection. With reliable control system and perfect leakproof design, it operates safely and conforms to semiconductor industrial standards.
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Feature |
Application |
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Features
| Wafer Size | 6″~8″ |
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General
| Edge Triming Accuracy | Ā±0.1mm |
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| Control Part | PLC and HMI |
| Gas Projection | CDA/N2 |
In stock
In stock
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