Electron Beam Evaporation System SA-VKE1100D/E1500D
Electron Beam Evaporation System SA-VKE1100D/E1500D Call for Price
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Electron Beam Evaporation System SA-VKE1500Pro - Image 1
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Electron Beam Evaporation System SA-VKE1500Pro
Electron Beam Evaporation System SA-VKE1500Pro - Image 2
Electron Beam Evaporation System SA-VKE1500Pro - Image 3

Electron Beam Evaporation System SA-VKE1500Pro

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SKU: SA-VKE1500Pro

Ā Ā Ā Ā Ā Ā SA-VKE1500Pro is a wafer-level fully-automatic electron-beam evaporation system. Equipped with an EFEM system, it delivers high-performance, stable and reliable operation alongside low-maintenance design to satisfy mass-production requirements.Ā 

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Description

Datasheet
Ā  Ā SA-VKE1500Pro is a wafer-level fully-automatic electron-beam evaporation system. Equipped with an EFEM system, it delivers high-performance, stable and reliable operation alongside low-maintenance design to satisfy mass-production requirements.

Feature

Application
  • Low cost
  • Lift-off
  • Co-deposition
  • High evaporation rate
  • Laser
  • R&D
  • Intergated circuit
  • MEMS

Principleļ¼š

Specification

Features

Number of Crucibles(max.)8
Uniform Deposition Area(max.)12ƗƘ200ā€Æmm
Ultimate Vacuum2E-5Pa

General

Power Supply(max.)10kW
Film thickness monitoringCrystal oscillator controller
Ion SourceRF & Kaufman & Hall ion source
Fixture typesDome & Knudsen & Planetary
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Coating UniformityĀ±2%
Coating RepeatabilityĀ±2%
Vacuum MeasurementFull-range vacuum gauge
Temperature RangeRT~200ā„ƒ
Size(LƗWƗH)8.5mƗ5.5mƗ3.3m

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