Electron Beam Evaporation System SA-VKE1100/E1500
Electron Beam Evaporation System SA-VKE1100/E1500
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Electron Beam Evaporation System SA-VKE360
Electron Beam Evaporation System SA-VKE360
Electron Beam Evaporation System SA-VKE500D - Image 1
Electron Beam Evaporation System SA-VKE500D - Image 2
Electron Beam Evaporation System SA-VKE500D - Image 3
Electron Beam Evaporation System SA-VKE500D - Image 4
Electron Beam Evaporation System SA-VKE500D
Electron Beam Evaporation System SA-VKE500D - Image 2
Electron Beam Evaporation System SA-VKE500D - Image 3
Electron Beam Evaporation System SA-VKE500D - Image 4

Electron Beam Evaporation System SA-VKE500D

SKU: SA-VKE500D

      SA-VKE500D is a research-grade electron beam evaporation platform. Featuring an interworking dual-chamber loadlock design where the upper and lower cavities serve as mutual loadlock units, it overcomes the technical bottleneck of loadlock integration for evaporators. The system fully meets process requirements for medium-small batch production and advanced experimental research platforms. 

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Description

Datasheet
SA-VKE500D is a research-grade electron beam evaporation platform. Featuring an interworking dual-chamber loadlock design where the upper and lower cavities serve as mutual loadlock units, it overcomes the technical bottleneck of loadlock integration for evaporators. The system fully meets process requirements for medium-small batch production and advanced experimental research platforms.

Feature

Application
  • Low cost
  • Lift-off
  • Co-deposition
  • High evaporation rate
  • Laser
  • R&D
  • Intergated circuit
  • MEMS

Principle：

Specification

Features

Uniform Deposition Area(max.)Ø260 mm
Ultimate Vacuum1E-5Pa

General

Number of Crucibles(max.)6
Automatic LoadlocksSingle &multi-chip automatic laodlock
Workpiece Angle-45°~45°，adjustable
Power Supply(max.)10kW
Film thickness monitoringCrystal oscillator controller
Ion SourceKaufman & Hall ion source
Fixture typesDome &Planetary
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Coating Uniformity±2%
Coating Repeatability±2%
Vacuum MeasurementFull-range vacuum gauge
Temperature RangeRT~500℃
Size(L×W×H)or(D×W×H)3m×2.5m×2.2m

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