Electron Beam Evaporation System SA-VKE1100/E1500
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Electron Beam Evaporation System SA-VKE800D
Electron Beam Evaporation System SA-VKE800D Call for Price
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Electron Beam Evaporation System SA-VKE500D
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Electron Beam Evaporation System SA-VKE500D

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SKU: SA-VKE500D

Ā Ā Ā Ā Ā Ā SA-VKE500D is a research-grade electron beam evaporation platform. Featuring an interworking dual-chamber loadlock design where the upper and lower cavities serve as mutual loadlock units, it overcomes the technical bottleneck of loadlock integration for evaporators. The system fully meets process requirements for medium-small batch production and advanced experimental research platforms.Ā 

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Description

Datasheet
SA-VKE500D is a research-grade electron beam evaporation platform. Featuring an interworking dual-chamber loadlock design where the upper and lower cavities serve as mutual loadlock units, it overcomes the technical bottleneck of loadlock integration for evaporators. The system fully meets process requirements for medium-small batch production and advanced experimental research platforms.

Feature

Application
  • Low cost
  • Lift-off
  • Co-deposition
  • High evaporation rate
  • Laser
  • R&D
  • Intergated circuit
  • MEMS

Principleļ¼š

Specification

Features

Number of Crucibles(max.)6
Uniform Deposition Area(max.)Ƙ260ā€Æmm
Ultimate Vacuum1E-5Pa

General

Automatic LoadlocksSingle &multi-chip automatic laodlock
Workpiece Angle-45Ā°~45Ā°ļ¼Œadjustable
Power Supply(max.)10kW
Film thickness monitoringCrystal oscillator controller
Ion SourceKaufman & Hall ion source
Fixture typesDome &Planetary
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Coating UniformityĀ±2%
Coating RepeatabilityĀ±2%
Vacuum MeasurementFull-range vacuum gauge
Temperature RangeRT~500ā„ƒ
Size(LƗWƗH)3mƗ2.5mƗ2.2m

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