Fully automatic furnace tube cleaning manchine SA-FTCM-48LS

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SKU: SA-FTCM-48LS

Ā Ā Ā Ā Ā Ā SA-FTCM-48LS adopts high-performance materials to endure acidic corrosive environments. It supports flexible operation modes and features automatic rotation and flushing functions. The chemical solution can be recycled to cut costs. All circuits and components are professionally treated for corrosion resistance, with reliable air protection. It operates safely and stably, complying with industry norms for semiconductor production.Ā 

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Description

SA-FTCM-48LS adopts high-performance materials to endure acidic corrosive environments. It supports flexible operation modes and features automatic rotation and flushing functions. The chemical solution can be recycled to cut costs. All circuits and components are professionally treated for corrosion resistance, with reliable air protection. It operates safely and stably, complying with industry norms for semiconductor production.

Feature

Application

  • Long-time Acidic Corrosion Resistant
  • Double-layer Leak-proof
  • Customize for Manual and Fully Automatic
  • Recycled and Reused Acid
  • ISO9001 Quality Assurance
  • Wafer Front-End Cleaning
  • Photolithography Cleaning
  • Etch Post-Cleaning
  • Thin Film Cleaning
  • Back-End Packaging

Specification

General

Tube SizeΦ450mm
Control PartPLC and HMI
Gas ProjectionCDA/N2

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