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Resistance Evaporation System SA-VKT360
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Indium Evaporation System SA-VKT550I - Image 1
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Indium Evaporation System SA-VKT550I
Indium Evaporation System SA-VKT550I - Image 2
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Indium Evaporation System SA-VKT550I

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SKU: SA-VKT550I

Ā Ā Ā Ā Ā Ā SA-VKT550I is a custom-built thermal resistance evaporation platform, specially optimized for ultra-precise indium bump formation. Boasting consistent reliable output, comprehensive automated operation and low upkeep costs, it fully satisfies stringent process standards for advanced flip-chip interconnection and bonding.Ā 

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Description

Datasheet

SA-VKT550I is a custom-built thermal resistance evaporation platform, specially optimized for ultra-precise indium bump formation. Boasting consistent reliable output, comprehensive automated operation and low upkeep costs, it fully satisfies stringent process standards for advanced flip-chip interconnection and bonding.

Feature

Application
  • Low cost
  • Easy operation
  • Customize
  • Mass production
  • Laser
  • R&D
  • Intergated circuit
  • MEMS

Principleļ¼š

Specification

Features

Uniform Deposition Area(max.)Ƙ300ā€Æmm
Ultimate Vacuum1E-5Pa

General

Power Supply(max.)8kW
Workpiece Angle-45Ā°~45Ā°ļ¼Œadjustable
Film thickness monitoringCrystal oscillator controller
Ion SourceKaufman & Hall ion source
Fixture typesDome & Knudsen & Plate
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Coating UniformityĀ±3%
Coating RepeatabilityĀ±2%
Vacuum MeasurementFull-range vacuum gauge
Temperature Range-80~200ā„ƒ
Size(LƗWƗH)3.3mƗ2.7mƗ2.2m

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