Showing all 9 results

Cleaning Machines perform efficient surface cleaning for semiconductor and optoelectronic wafers. With particle removal capability and low substrate damage, they ensure high cleanliness to stabilize subsequent fabrication processes.

Cleaning Machines

Fully automatic after gringing cleaning manchine SA-AGCM-48LS

SKU: SA-AGCM-48LS

In stock

Wafer Size4″~8″
Cleaning Capacity25pieces2baskets/batch
Control PartPLC and HMI

Fully automatic cassette cleaning manchine SA-CCM-48LS

SKU: SA-CCM-48LS

In stock

Wafer Size6″, 8″
Cleaning Capacitycassete:8pieces/batch, basket:16pieces/batch
Up Time≥98%
MTTR<2hrs
MTBF≥400hrs
Control PartPLC and HMI

Fully automatic de-edge cleaning manchine SA-DECM-48LS

SKU: SA-DECM-48LS

In stock

Wafer Size6″~8″
Edge Triming Accuracy±0.1mm
Control PartPLC and HMI
Gas ProjectionCDA/N2

Fully automatic final cleaning manchine SA-FCM-48LS

SKU: SA-FCM-48LS

In stock

Wafer Size6″, 8″
Processing Capacity50 wafers /tank time
Solution Temperature50℃~80℃±1℃
Megasonic Cleaning950KHz,400W
Solution Accuracy Error≤ 1%
Metal Ions≤ 5E10 atoms/cm2
Particle Control≤ 10 pieces/wafer@0.3μm, ≤ 20 pieces/wafer@0.2μm
Production Efficiency≥ 275 wafers/hour

Fully automatic furnace tube cleaning manchine SA-FTCM-48LS

SKU: SA-FTCM-48LS

In stock

Tube SizeΦ450mm
Control PartPLC and HMI
Gas ProjectionCDA/N2

Fully automatic Nickel and Gold Plating Cleaning Machine SA-NAGP-48LS

SKU: SA-NAGP-48LS

In stock

Temperature Control Accuracy±1℃
Control PartPLC and HMI

Fully automatic RCA cleaning manchine SA-RCA-48LS

SKU: SA-RCA-48LS

In stock

Wafer Size12″, 4″, 5″, 6″, 8″
Cleaning Capacity4″~8″:25pieces2baskets/batch, 12″:25pieces/batch
Control PartPLC and HMI

Fully automatic single wafer cleaner SA-SWC-48LS

SKU: SA-SWC-48LS

In stock

Wafer Size4″&6″, 6″&8″, 8″&12″
Hot

Fully automatic wafer etching manchine SA-WEM-48LS

SKU: SA-WEM-48LS

In stock

Wafer Size4″~12″
Ness IncrementδTTV≤1.5μm
Cleaning Capacity6″:75pieces/time, 8″/12″:50pieces/time