Showing all 9 results
Cleaning Machines perform efficient surface cleaning for semiconductor and optoelectronic wafers. With particle removal capability and low substrate damage, they ensure high cleanliness to stabilize subsequent fabrication processes.
Filter by Brands
- Saura (9)
Cleaning Machines
Fully automatic after gringing cleaning manchine SA-AGCM-48LS
SKU:
SA-AGCM-48LS
Rated 0 out of 5
In stock
Login to see prices| Wafer Size | 4″~8″ |
|---|---|
| Cleaning Capacity | 25pieces2baskets/batch |
| Control Part | PLC and HMI |
Fully automatic cassette cleaning manchine SA-CCM-48LS
SKU:
SA-CCM-48LS
Rated 0 out of 5
In stock
Login to see prices| Wafer Size | 6″, 8″ |
|---|---|
| Cleaning Capacity | cassete:8pieces/batch, basket:16pieces/batch |
| Up Time | ≥98% |
| MTTR | <2hrs |
| MTBF | ≥400hrs |
| Control Part | PLC and HMI |
Fully automatic de-edge cleaning manchine SA-DECM-48LS
SKU:
SA-DECM-48LS
Rated 0 out of 5
In stock
Login to see prices| Wafer Size | 6″~8″ |
|---|---|
| Edge Triming Accuracy | ±0.1mm |
| Control Part | PLC and HMI |
| Gas Projection | CDA/N2 |
Fully automatic final cleaning manchine SA-FCM-48LS
SKU:
SA-FCM-48LS
Rated 0 out of 5
In stock
Login to see prices| Wafer Size | 6″, 8″ |
|---|---|
| Processing Capacity | 50 wafers /tank time |
| Solution Temperature | 50℃~80℃±1℃ |
| Megasonic Cleaning | 950KHz,400W |
| Solution Accuracy Error | ≤ 1% |
| Metal Ions | ≤ 5E10 atoms/cm2 |
| Particle Control | ≤ 10 pieces/wafer@0.3μm, ≤ 20 pieces/wafer@0.2μm |
| Production Efficiency | ≥ 275 wafers/hour |
Fully automatic furnace tube cleaning manchine SA-FTCM-48LS
SKU:
SA-FTCM-48LS
Rated 0 out of 5
In stock
Login to see prices| Tube Size | Φ450mm |
|---|---|
| Control Part | PLC and HMI |
| Gas Projection | CDA/N2 |
Fully automatic Nickel and Gold Plating Cleaning Machine SA-NAGP-48LS
SKU:
SA-NAGP-48LS
Rated 0 out of 5
In stock
Login to see prices| Temperature Control Accuracy | ±1℃ |
|---|---|
| Control Part | PLC and HMI |
Fully automatic RCA cleaning manchine SA-RCA-48LS
SKU:
SA-RCA-48LS
Rated 0 out of 5
In stock
Login to see prices| Wafer Size | 12″, 4″, 5″, 6″, 8″ |
|---|---|
| Cleaning Capacity | 4″~8″:25pieces2baskets/batch, 12″:25pieces/batch |
| Control Part | PLC and HMI |
Fully automatic single wafer cleaner SA-SWC-48LS
SKU:
SA-SWC-48LS
Rated 0 out of 5
In stock
Login to see prices| Wafer Size | 4″&6″, 6″&8″, 8″&12″ |
|---|
Fully automatic wafer etching manchine SA-WEM-48LS
SKU:
SA-WEM-48LS
Rated 0 out of 5
In stock
Login to see prices| Wafer Size | 4″~12″ |
|---|---|
| Ness Increment | δTTV≤1.5μm |
| Cleaning Capacity | 6″:75pieces/time, 8″/12″:50pieces/time |