Showing 25–36 of 55 results

PRODUCTS

Fully automatic furnace tube cleaning manchine SA-FTCM-48LS

In stock

SKU: SA-FTCM-48LS
Tube SizeΦ450mm
Control PartPLC and HMI
Gas ProjectionCDA/N2

Fully automatic Nickel and Gold Plating Cleaning Machine SA-NAGP-48LS

In stock

SKU: SA-NAGP-48LS
Temperature Control Accuracy±1℃
Control PartPLC and HMI

Fully Automatic Photonics Wafer Test System SA-WIT-220AL

In stock

SKU: SA-WIT-220AL
Wafer Size2″~12″
Loading MethodAutomatic
Loading TypeCassette/FOUP
Testing Capacity25~50 pcs/run
Wafer-IDOCR-based automatic Wafer-ID recognition with Wafer Map generation
Auxiliary ChuckEnables automatic probe cleaning, RF calibration, FA calibration, PD power/polarization calibration
Single-Probe MarkingYes
Self-CleaningYes (for wafer, Chuck, probes, FA)
Real-Time Height SensingYes
Chuck Height CalibrationYes
Chuck Positioning Accuracy±2µm
Temperature Range-40~125℃

Fully automatic RCA cleaning manchine SA-RCA-48LS

In stock

SKU: SA-RCA-48LS
Wafer Size12″, 4″, 5″, 6″, 8″
Cleaning Capacity4″~8″:25pieces2baskets/batch, 12″:25pieces/batch
Control PartPLC and HMI

Fully automatic single wafer cleaner SA-SWC-48LS

In stock

SKU: SA-SWC-48LS
Wafer Size4″&6″, 6″&8″, 8″&12″

Fully automatic slot developing manchine SA-SDM-48LS

In stock

SKU: SA-SDM-48LS
Wafer Size4″~6″
Cleaning Capacity25pieces2baskets or 4baskets/batch
Hot

Fully automatic wafer etching manchine SA-WEM-48LS

In stock

SKU: SA-WEM-48LS
Wafer Size4″~12″
Ness IncrementδTTV≤1.5μm
Cleaning Capacity6″:75pieces/time, 8″/12″:50pieces/time

General PVD System SA-eVictor AX20P

In stock

SKU: SA-eVictor AX20P
Wafer Size6″, 8″
THK mean(A)1000±50(Ni), 600±30(Ti), 1000±50(TiN), 40K±2K(Al)
Rs Mean(Ω/□)1±0.02(Ni), 11±1.0(Ti), 16±3.0(TiN), 0.75±0.05(Al)
Rs U%(WIW,%,16)< 3%
Infilm Particle< 30ea@0.3μm
Size(L×W×H)or(D×W×H)2700mm×3200mm×2200mm, 4400mm×3100mm×2200mm

General PVD System SA-Polaris BM620

In stock

SKU: SA-Polaris BM620
Wafer Size6″, 8″
THK mean(A)1500±75(Ni), 2000±100(Ti), 10K±500(Ag)
Rs Mean(Ω/□)0.6±0.1(Ni), 2.9±0.3(Ti), 0.021±0.005(Ag)
Rs U%(WIW,%,16)< 3@EE3
Infilm Particle< 30ea@0.3μm
Size(L×W×H)or(D×W×H)2700mm×3200mm×2200mm, 4400mm×3100mm×2200mm

Horizontal dryer SA-HLD-48LS

In stock

SKU: SA-HLD-48LS
NoneNone

Indium Evaporation System SA-VKT550I

In stock

SKU: SA-VKT550I
Power Supply(max.)8kW
Workpiece Angle-45°~45°,adjustable
Film thickness monitoringCrystal oscillator controller
Ion SourceKaufman & Hall ion source
Fixture typesDome & Knudsen & Plate
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Coating Uniformity±3%
Coating Repeatability±2%
Uniform Deposition Area(max.)Ø300 mm
Ultimate Vacuum1E-5Pa
Vacuum MeasurementFull-range vacuum gauge
Temperature Range-80~200℃
Size(L×W×H)or(D×W×H)3.3m×2.7m×2.2m

Magnetron Sputter System SA-VKM360

In stock

SKU: SA-VKM360
Number of Cathodes(max.)4
Sputtering Power SupplyDC / RF / pulsed DC, freely switchable
Ion SourceRF & Kaufman & Hall ion source
BiasRF / pulsed DC
Vacuum Sampling Chamberoptional
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Flow ControlDigital mass flow meter
Coating Uniformity±3%
Coating Repeatability±2%
Uniform Deposition Area(max.)Ø150 mm
Vacuum MeasurementFull-range vacuum gauge + ‌Capacitance diaphragm gauge
Ultimate Vacuum1E-5Pa
Temperature RangeRT~300℃
Size(L×W×H)or(D×W×H)1.6m×2.75m×1.8m