Showing 1–12 of 18 results
PVD Systems deliver high-quality thin-film deposition through physical vapor deposition processes. With stable film uniformity and versatile material compatibility, they support precise coating applications across optoelectronic and semiconductor device manufacturing.
Chain Magnetron Sputter System SA-VKI2000
SKU:
SA-VKI2000
In stock
Login to see prices| Number of Cathodes(max.) | 2 |
|---|---|
| Sputtering Power Supply | DC / RF / pulsed DC, freely switchable |
| Ion Source | Anode & Kaufman & RF ion source |
| Bias | RF / pulsed DC |
| Vacuum Sampling Chamber | Fully-automatic sampling chamber, optional |
| Pumping System | Cryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump |
| Flow Control | Digital mass flow meter |
| Coating Uniformity | ±3% |
| Coating Repeatability | ±2% |
| Uniform Deposition Area(max.) | 1000 mm×1000 mm |
| Ultimate Vacuum | 3E-5Pa |
| Vacuum Measurement | Full-range vacuum gauge + Capacitance diaphragm gauge |
| Temperature Range | RT~300℃ |
| Size(L×W×H)or(D×W×H) | 5m×2.8m×1.6m |
Electron Beam Evaporation System SA-VKE1100/E1500
SKU:
SA-VKE1100/E1500
In stock
Login to see prices| Number of Crucibles(max.) | 8 |
|---|---|
| Power Supply(max.) | 10kW |
| Film thickness monitoring | Crystal oscillator controller |
| Ion Source | RF & Kaufman & Hall ion source |
| Fixture types | Dome & Knudsen & Planetary |
| Pumping System | Cryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump |
| Coating Uniformity | ±2% |
| Coating Repeatability | ±2% |
| Uniform Deposition Area(max.) | Ø300 mm |
| Ultimate Vacuum | 2E-5Pa |
| Vacuum Measurement | Full-range vacuum gauge |
| Temperature Range | RT~300℃ |
| Size(L×W×H)or(D×W×H) | 4.05m×3.9m×2.8m |
Electron Beam Evaporation System SA-VKE1100D/E1500D
SKU:
SA-VKE1100D/E1500D
In stock
Login to see prices| Number of Crucibles(max.) | 4 |
|---|---|
| Power Supply(max.) | 10kW |
| Film thickness monitoring | Crystal oscillator controller |
| Ion Source | RF & Kaufman & Hall ion source |
| Fixture types | Dome & Planetary |
| Pumping System | Cryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump |
| Coating Uniformity | ±2% |
| Coating Repeatability | ±2% |
| Uniform Deposition Area(max.) | Ø960 mm |
| Ultimate Vacuum | 1E-5Pa |
| Vacuum Measurement | Full-range vacuum gauge |
| Temperature Range | RT~300℃ |
| Size(L×W×H)or(D×W×H) | 4.4m×4.1m×2.6m |
Electron Beam Evaporation System SA-VKE1500Pro
SKU:
SA-VKE1500Pro
In stock
Login to see prices| Number of Crucibles(max.) | 8 |
|---|---|
| Power Supply(max.) | 10kW |
| Film thickness monitoring | Crystal oscillator controller |
| Ion Source | RF & Kaufman & Hall ion source |
| Fixture types | Dome & Knudsen & Planetary |
| Pumping System | Cryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump |
| Coating Uniformity | ±2% |
| Coating Repeatability | ±2% |
| Uniform Deposition Area(max.) | 12×Ø200 mm |
| Ultimate Vacuum | 2E-5Pa |
| Vacuum Measurement | Full-range vacuum gauge |
| Temperature Range | RT~200℃ |
| Size(L×W×H)or(D×W×H) | 8.5m×5.5m×3.3m |
Electron Beam Evaporation System SA-VKE360
SKU:
SA-VKE360
In stock
Login to see prices| Number of Crucibles(max.) | 6 |
|---|---|
| Power Supply(max.) | 10kW |
| Automatic Loadlocks | Single &multi-chip automatic laodlock |
| Workpiece Angle | -45°~45°，adjustable |
| Film thickness monitoring | Crystal oscillator controller |
| Ion Source | Hall ion source |
| Fixture types | Dome & Plate |
| Pumping System | Cryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump |
| Coating Uniformity | ±3% |
| Coating Repeatability | ±2% |
| Uniform Deposition Area(max.) | Ø200 mm |
| Ultimate Vacuum | 1E-5Pa |
| Vacuum Measurement | Full-range vacuum gauge |
| Temperature Range | -50~300℃ |
| Size(L×W×H)or(D×W×H) | 3.15m×2.4m×2.2m |
Electron Beam Evaporation System SA-VKE500D
SKU:
SA-VKE500D
In stock
Login to see prices| Number of Crucibles(max.) | 6 |
|---|---|
| Automatic Loadlocks | Single &multi-chip automatic laodlock |
| Workpiece Angle | -45°~45°，adjustable |
| Power Supply(max.) | 10kW |
| Film thickness monitoring | Crystal oscillator controller |
| Ion Source | Kaufman & Hall ion source |
| Fixture types | Dome &Planetary |
| Pumping System | Cryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump |
| Coating Uniformity | ±2% |
| Coating Repeatability | ±2% |
| Uniform Deposition Area(max.) | Ø260 mm |
| Ultimate Vacuum | 1E-5Pa |
| Vacuum Measurement | Full-range vacuum gauge |
| Temperature Range | RT~500℃ |
| Size(L×W×H)or(D×W×H) | 3m×2.5m×2.2m |
Electron Beam Evaporation System SA-VKE550/E800
SKU:
SA-VKE500/E800
In stock
Login to see prices| Number of Crucibles(max.) | 8 |
|---|---|
| Power Supply(max.) | 10kW |
| Automatic Loadlocks | Single &multi-chip automatic laodlock |
| Film thickness monitoring | Crystal oscillator controller |
| Ion Source | RF & Kaufman & Hall ion source |
| Fixture types | Dome & Knudsen & Planetary &Plate |
| Pumping System | Cryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump |
| Coating Uniformity | ±3% |
| Coating Repeatability | ±2% |
| Uniform Deposition Area(max.) | Ø300 mm |
| Ultimate Vacuum | 1E-5Pa |
| Vacuum Measurement | Full-range vacuum gauge |
| Temperature Range | RT~300℃ |
| Size(L×W×H)or(D×W×H) | 3.35m×2.8m×2.2m |
Electron Beam Evaporation System SA-VKE800D
SKU:
SA-VKE800D
In stock
Login to see prices| Number of Crucibles(max.) | 6 |
|---|---|
| Automatic Loadlocks | Single &multi-chip automatic laodlock |
| Workpiece Angle | -45°~45°，adjustable |
| Power Supply(max.) | 10kW |
| Film thickness monitoring | Crystal oscillator controller |
| Ion Source | Kaufman & Hall ion source |
| Fixture types | Dome & Planetary |
| Pumping System | Cryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump |
| Coating Uniformity | ±2% |
| Coating Repeatability | ±2% |
| Uniform Deposition Area(max.) | Ø300 mm |
| Ultimate Vacuum | 1E-5Pa |
| Vacuum Measurement | Full-range vacuum gauge |
| Temperature Range | RT~500℃ |
| Size(L×W×H)or(D×W×H) | 4.0m×3.1m×2.9m |
General PVD System SA-eVictor AX20P
SKU:
SA-eVictor AX20P
In stock
Login to see prices| Wafer Size | 6″, 8″ |
|---|---|
| THK mean(A) | 1000±50(Ni), 600±30(Ti), 1000±50(TiN), 40K±2K(Al) |
| Rs Mean(Ω/□) | 1±0.02(Ni), 11±1.0(Ti), 16±3.0(TiN), 0.75±0.05(Al) |
| Rs U%(WIW,%,16) | < 3% |
| Infilm Particle | < 30ea@0.3μm |
| Size(L×W×H)or(D×W×H) | 2700mm×3200mm×2200mm, 4400mm×3100mm×2200mm |
General PVD System SA-Polaris BM620
SKU:
SA-Polaris BM620
In stock
Login to see prices| Wafer Size | 6″, 8″ |
|---|---|
| THK mean(A) | 1500±75(Ni), 2000±100(Ti), 10K±500(Ag) |
| Rs Mean(Ω/□) | 0.6±0.1(Ni), 2.9±0.3(Ti), 0.021±0.005(Ag) |
| Rs U%(WIW,%,16) | < 3@EE3 |
| Infilm Particle | < 30ea@0.3μm |
| Size(L×W×H)or(D×W×H) | 2700mm×3200mm×2200mm, 4400mm×3100mm×2200mm |
Indium Evaporation System SA-VKT550I
SKU:
SA-VKT550I
In stock
Login to see prices| Power Supply(max.) | 8kW |
|---|---|
| Workpiece Angle | -45°~45°，adjustable |
| Film thickness monitoring | Crystal oscillator controller |
| Ion Source | Kaufman & Hall ion source |
| Fixture types | Dome & Knudsen & Plate |
| Pumping System | Cryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump |
| Coating Uniformity | ±3% |
| Coating Repeatability | ±2% |
| Uniform Deposition Area(max.) | Ø300 mm |
| Ultimate Vacuum | 1E-5Pa |
| Vacuum Measurement | Full-range vacuum gauge |
| Temperature Range | -80~200℃ |
| Size(L×W×H)or(D×W×H) | 3.3m×2.7m×2.2m |
Magnetron Sputter System SA-VKM360
SKU:
SA-VKM360
In stock
Login to see prices| Number of Cathodes(max.) | 4 |
|---|---|
| Sputtering Power Supply | DC / RF / pulsed DC, freely switchable |
| Ion Source | RF & Kaufman & Hall ion source |
| Bias | RF / pulsed DC |
| Vacuum Sampling Chamber | optional |
| Pumping System | Cryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump |
| Flow Control | Digital mass flow meter |
| Coating Uniformity | ±3% |
| Coating Repeatability | ±2% |
| Uniform Deposition Area(max.) | Ø150 mm |
| Vacuum Measurement | Full-range vacuum gauge + Capacitance diaphragm gauge |
| Ultimate Vacuum | 1E-5Pa |
| Temperature Range | RT~300℃ |
| Size(L×W×H)or(D×W×H) | 1.6m×2.75m×1.8m |