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PRODUCTS

Automatic Ball Wire Bonder SA-BWB-6000PC

SKU: SA-BWB-6000PC

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Bonding Accuracy±3 μm@3sigma
Bonding StrokeX=60mm,Y=70mm
Length of Wire Bonding≤7mm
Loop Height Accuracy±25.4μm
Loop TypesQ-loop / SQ-loop / BGA-TWS
Spool Diameter50mm(2inches)
Bonding Force0~360g
Bonding Wire TypeGold, Copper, CuPd, Ag, Alloy wire(18~50μm)
Bonding Speed45ms(2mm wire length)
Operating SystemWindows
Optical SystemOption between Ɨ2~Ɨ4 and Ɨ1.6~Ɨ3.6 times, both with programmable focus
Weight650Kg
Input Voltage220V±10%@50~60Hz
Power2KW
Compressed Air Requirement≄0.35MPa
Size(LƗWƗH)1000mmƗ1300mmƗ1700mm

Automatic Ball Wire Bonder SA-BWB-6000Plus

SKU: SA-BWB-6000Plus

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Bonding Accuracy±2 μm@3sigma
Bonding StrokeX=60mm,Y=70mm(LF width ≤80mm)
Length of Wire Bonding≤7mm
Min Bond Pad Pitch45μm
Loop TypesQ-loop / SQ-loop / BGA-TWS
Spool Diameter50mm(2inches)
Wire Bonding Capacity(max.)30,000 wires/panel
Bonding Wire TypeGold wire, copper wire, palladium-coated copper wire, silver wire, alloy wires(18~50μm)
Bonding Speed45ms(2mm wire line)
Operating SystemWindows
Optical SystemOption between Ɨ2~Ɨ4 and Ɨ1.6~Ɨ3.6 times, both with programmable focus
Weight650Kg
Input Voltage220V±10%@50~60Hz
Power2KW
Compressed Air Requirement≄0.35MPa
Size(LƗWƗH)1000mmƗ1300mmƗ1700mm

Automatic Deep Access Wire Bonder SA-DAWB-6000B

SKU: SA-DAWB-6000B

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Bonding Accuracy±3 μm@3sigma
Bonding AreaX-axis: 305 mm, Y-axis: 457 mm, rotation range: 0~180°
Ultrasonic0~4 W precise control with stepped flexible energy output
Loop ControlFully programmable
Cavity Depth12mm(max.)
Bonding Force0~220g
Capillary Length16mm/19mm
Bonding Wire TypeGold wire(18~75μm), copper wire (18~75 μm), selected alloy wires
Bonding Speed≄5wires/s
Operating SystemWindows
Weight1.2T
Input Voltage220V±10%@50~60Hz
Power2KW
Compressed Air Requirement≄0.35MPa
Size(LƗWƗH)1500mmƗ1000mmƗ1700mm

Automatic Deep Access Wire Bonder SA-DAWB-6000W

SKU: SA-DAWB-6000W

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Bonding Accuracy±3 μm@3sigma
Bonding AreaX-axis: 305 mm, Y-axis: 457 mm, rotation range: ±220°
Ultrasonic0~4 W precise control with stepped flexible energy output
Loop ControlFully programmable
Cavity Depth16mm(max.)
Bonding Force0~220g
Capillary Length19mm/25mm
Bonding Wire TypeGold wire(18~75μm), aluminum wire (18~75 μm), gold ribbon (12.7Ɨ50 μm ~ 25.4Ɨ300 μm), partial alloy wires
Bonding Speed≄5wires/s
Operating SystemWindows
Weight1.2T
Input Voltage220V±10%@50~60Hz
Power2KW
Compressed Air Requirement≄0.35MPa
Size(LƗWƗH)1500mmƗ1000mmƗ1700mm

Chain Magnetron Sputter System SA-VKI2000

SKU: SA-VKI2000

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Number of Cathodes(max.)2
Sputtering Power SupplyDC / RF / pulsed DC, freely switchable
Ion SourceAnode & Kaufman & RF ion source
BiasRF / pulsed DC
Vacuum Sampling ChamberFully-automatic sampling chamber, optional
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Flow ControlDigital mass flow meter
Coating Uniformity±3%
Coating Repeatability±2%
Uniform Deposition Area(max.)1000 mmƗ1000 mm
Ultimate Vacuum3E-5Pa
Vacuum MeasurementFull-range vacuum gauge + ā€ŒCapacitance diaphragm gauge
Temperature RangeRT~300ā„ƒ
Size(LƗWƗH)5mƗ2.8mƗ1.6m

Dielectric Etcher SA-NMC508SDH/SDL

SKU: SA-NMC508SDH/SDL

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Wafer Size6″, 8″
Etching MaterialsDielectric SiO2, Dielectric SiNx, Dielectric SiON
ProcessesFEOL/BEOL(HM/CT/Spacer/Via/PAD)
SHDSi(SDH), Al-Y2O3 coating(SDL)
Gas InjectionDual zone inject(10-90% adj)
Temp ControlChiller
CathodeDual zone ESC
Process ModeClean Mode(SDL)
Etch Rate(ER)> 4500 A/min(SDH), >6000 A/min(SDL)
Sidewall Roughness< 1 nm(SDH)
U%WIW < 3% @ EE3mm, WTW < 3%
WPH~ 10 @15K(SDH), 12 @10K(SDL)
COC1
MTTR<1h(SDH)
MTBC> 200 RFh(SDH), > 150 RFh(SDL)
Size(LƗWƗH)3279mmƗ3253mmƗ2339mm

Electron Beam Evaporation System SA-VKE1100/E1500

SKU: SA-VKE1100/E1500

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Number of Crucibles(max.)8
Power Supply(max.)10kW
Film thickness monitoringCrystal oscillator controller
Ion SourceRF & Kaufman & Hall ion source
Fixture typesDome & Knudsen & Planetary
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Coating Uniformity±2%
Coating Repeatability±2%
Uniform Deposition Area(max.)Ƙ300 mm
Ultimate Vacuum2E-5Pa
Vacuum MeasurementFull-range vacuum gauge
Temperature RangeRT~300ā„ƒ
Size(LƗWƗH)4.05mƗ3.9mƗ2.8m

Electron Beam Evaporation System SA-VKE1100D/E1500D

SKU: SA-VKE1100D/E1500D

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Number of Crucibles(max.)4
Power Supply(max.)10kW
Film thickness monitoringCrystal oscillator controller
Ion SourceRF & Kaufman & Hall ion source
Fixture typesDome & Planetary
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Coating Uniformity±2%
Coating Repeatability±2%
Uniform Deposition Area(max.)Ƙ960 mm
Ultimate Vacuum1E-5Pa
Vacuum MeasurementFull-range vacuum gauge
Temperature RangeRT~300ā„ƒ
Size(LƗWƗH)4.4mƗ4.1mƗ2.6m

Electron Beam Evaporation System SA-VKE1500Pro

SKU: SA-VKE1500Pro

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Number of Crucibles(max.)8
Power Supply(max.)10kW
Film thickness monitoringCrystal oscillator controller
Ion SourceRF & Kaufman & Hall ion source
Fixture typesDome & Knudsen & Planetary
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Coating Uniformity±2%
Coating Repeatability±2%
Uniform Deposition Area(max.)12ƗƘ200 mm
Ultimate Vacuum2E-5Pa
Vacuum MeasurementFull-range vacuum gauge
Temperature RangeRT~200ā„ƒ
Size(LƗWƗH)8.5mƗ5.5mƗ3.3m

Electron Beam Evaporation System SA-VKE360

SKU: SA-VKE360

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Number of Crucibles(max.)6
Power Supply(max.)10kW
Automatic LoadlocksSingle &multi-chip automatic laodlock
Workpiece Angle-45°~45°,adjustable
Film thickness monitoringCrystal oscillator controller
Ion SourceHall ion source
Fixture typesDome & Plate
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Coating Uniformity±3%
Coating Repeatability±2%
Uniform Deposition Area(max.)Ƙ200 mm
Ultimate Vacuum1E-5Pa
Vacuum MeasurementFull-range vacuum gauge
Temperature Range-50~300ā„ƒ
Size(LƗWƗH)3.15mƗ2.4mƗ2.2m

Electron Beam Evaporation System SA-VKE500D

SKU: SA-VKE500D

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Number of Crucibles(max.)6
Automatic LoadlocksSingle &multi-chip automatic laodlock
Workpiece Angle-45°~45°,adjustable
Power Supply(max.)10kW
Film thickness monitoringCrystal oscillator controller
Ion SourceKaufman & Hall ion source
Fixture typesDome &Planetary
Pumping SystemCryopump / magnetically levitated turbo-molecular pump + Dry mechanical pump
Coating Uniformity±2%
Coating Repeatability±2%
Uniform Deposition Area(max.)Ƙ260 mm
Ultimate Vacuum1E-5Pa
Vacuum MeasurementFull-range vacuum gauge
Temperature RangeRT~500ā„ƒ
Size(LƗWƗH)3mƗ2.5mƗ2.2m